In this work, deformation mechanisms of polar and non-polar zinc oxide (ZnO) were studied by nanoindentation tests. The stable crystal structure of ZnO is the wurtzite with a strong anisotropic character observed in relation to the piezoelectricity and spontaneous polarization properties, for example. The mechanical deformation mechanisms of these sorts of materials are not yet fully understood, being of vital importance for optoelectronic devices optimization.For each ZnO crystallographic orientation, the induced defects damages were analyzed by transmission electron microscopy (TEM) and correlated with the slip of basal planes {0001} in the divergent directions for the both non-polar faces (1100) and (1120), as well as for the both polar faces (0001) and (0001). Screw perfect dislocations were identified by propagating through the slip system (1120)(0001). The beginning of plastic deformation in single crystals is marked by pop-ins events. Such events were identified and analyzed in function of the applied force and size. The residual impressions topography and shape were analyzed by atomic force microscopy (AFM). The observed defects on the surface were propagated in a preferred direction induced by stress components around the indentation. Tensile stress generation in a certain direction increases the dislocations mobility, while compressive stress contributes to pinning regions. Stress components were identified and their magnitudes were estimated by cathode luminescence method. The polar face (0001) showed a reactive behavior; some defects produced underneath the surface were revealed by samples cleaning process.