In this work, we study films deposited by three organosilanes in liquid phase by the plasma deposition method (PECVD) on 316L stainless steel plates and crystalline silicon slides <100>. The liquids employed were Hexamethyldisilazane (HMDSN), Hexamethyldisiloxane (HMDSO) and Hexamethyldisilane (HMDS). We determined the structural, mechanical and tribological properties of grown films, and the feasibility of their use as a protective coating. Two sets of samples were deposited for each liquid, the first at 200C and the second at 300C. In each set, the bias at the growth was varied ranging from -150V to -450V. Attempts were made to characterize films grown at room temperature, but we did not succeed because they delaminated. The films were characterized by profilometry techniques, where we determined that the films grown with temperatures of 200oC had the highest deposition rate. The films were also analyzed by x-ray photoelectron spectroscopy (XPS), infrared absorption spectroscopy (FTIR) and glow discharge optical emission spectroscopy (GDOES), where we identified the atomic concentrations and the chemical bonds present in the films. With the Raman spectroscopy we observed that the films have presence of carbons with hybridization sp2. The films synthesized have a strong polymeric character, and for those grown with bias higher than -250V, we observed the presence of D- and G- bands that are characteristics of amorphous carbon films. Analysis by nanoindentation determined that the films had a hardness between 18 and 21 GPa. Atomic force microscopy showed that the films have a roughness RMS around 0.3nm. Measurement of tribology showed that the films have a coefficient of friction of 0.25. After the tribology measurements, profilometry images were made to determine the wear. The films were resistant, with the lowest rate of 7 nm/min when subjected to a force of 0.3 Newtons and as against a body of stainless steel (AISI302), and after the measurements the films did not delaminate. Regarding the aging of the film, some were synthesized for more than 4 years, and remain well adhered both on the steel substrate and silicon. We also verified the feasibility of using hexamethyldisilazane (HMDSN) as an adhesive layer for the deposition of hydrogenated amorphous carbon films on stainless steel substrate successfully. We also deposited a film from the hexamethyldisiloxane (HMDSO) on a stainless steel screw to verify the feasibility for deposition on materials with different geometries, successfully, the film was well adhered on its surface.