Título: | SUPERFICIAL INCORPORATION OF NITROGEN IN FILM DLC TREATED IN PLASMA OF RADIO FREQUENCY | ||||||||||||||||||||||||||||||||||||||||
Autor: |
VICENTE AGUSTIN ATOCHE ESPINOZA |
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Colaborador(es): |
FERNANDO LAZARO FREIRE JUNIOR - Orientador |
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Catalogação: | 09/SET/2003 | Língua(s): | PORTUGUESE - BRAZIL |
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Tipo: | TEXT | Subtipo: | THESIS | ||||||||||||||||||||||||||||||||||||||
Notas: |
[pt] Todos os dados constantes dos documentos são de inteira responsabilidade de seus autores. Os dados utilizados nas descrições dos documentos estão em conformidade com os sistemas da administração da PUC-Rio. [en] All data contained in the documents are the sole responsibility of the authors. The data used in the descriptions of the documents are in conformity with the systems of the administration of PUC-Rio. |
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Referência(s): |
[pt] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=3884&idi=1 [en] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=3884&idi=2 |
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DOI: | https://doi.org/10.17771/PUCRio.acad.3884 | ||||||||||||||||||||||||||||||||||||||||
Resumo: | |||||||||||||||||||||||||||||||||||||||||
Amorphous Hydrogenated carbon films (a - C: H) and
nitrogenated films ) (a - C: H(N) - deposited by plasma
enhanced chemical vapor deposition in 4 CH and CH4-N2
atmospheres were submitted to nitrogen r.f.- plasma
treatment. The influence of several parameters was
investigated: the chamber pressure, the self-bias voltage
and the exposure time. The erosion rate was determined by
profilometry. It increases as the self-bias increases and
tends to saturate for higher pressures. The nitrogen
incorporated in the films was measured by nuclear reation
analysis. The results indicate a decrease in the
N content a the self-bias increase that can be atributted
toen increase of the sputtering yield. The chemical bonds
were probed by XPS and two chemical environments can be
identified, one with N atoms surrounded by C atoms and the
other one with N atoms binding to H. Surface roughness and
friction coefficient modifications were followed by atomic
force and lateral force microscopies. The surface roughness
is independent on the value of the self-bias voltage, while
the friction coefficient slightly decreases.
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