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Título: SUPERFICIAL INCORPORATION OF NITROGEN IN FILM DLC TREATED IN PLASMA OF RADIO FREQUENCY
Autor: VICENTE AGUSTIN ATOCHE ESPINOZA
Colaborador(es): FERNANDO LAZARO FREIRE JUNIOR - Orientador
Catalogação: 09/SET/2003 Língua(s): PORTUGUESE - BRAZIL
Tipo: TEXT Subtipo: THESIS
Notas: [pt] Todos os dados constantes dos documentos são de inteira responsabilidade de seus autores. Os dados utilizados nas descrições dos documentos estão em conformidade com os sistemas da administração da PUC-Rio.
[en] All data contained in the documents are the sole responsibility of the authors. The data used in the descriptions of the documents are in conformity with the systems of the administration of PUC-Rio.
Referência(s): [pt] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=3884&idi=1
[en] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=3884&idi=2
DOI: https://doi.org/10.17771/PUCRio.acad.3884
Resumo:
Amorphous Hydrogenated carbon films (a - C: H) and nitrogenated films ) (a - C: H(N) - deposited by plasma enhanced chemical vapor deposition in 4 CH and CH4-N2 atmospheres were submitted to nitrogen r.f.- plasma treatment. The influence of several parameters was investigated: the chamber pressure, the self-bias voltage and the exposure time. The erosion rate was determined by profilometry. It increases as the self-bias increases and tends to saturate for higher pressures. The nitrogen incorporated in the films was measured by nuclear reation analysis. The results indicate a decrease in the N content a the self-bias increase that can be atributted toen increase of the sputtering yield. The chemical bonds were probed by XPS and two chemical environments can be identified, one with N atoms surrounded by C atoms and the other one with N atoms binding to H. Surface roughness and friction coefficient modifications were followed by atomic force and lateral force microscopies. The surface roughness is independent on the value of the self-bias voltage, while the friction coefficient slightly decreases.
Descrição: Arquivo:   
COVER, ACKNOWLEDGEMENTS, RESUMO, ABSTRACT, SUMMARY AND LISTS PDF      
CHAPTER 1 PDF      
CHAPTER 2 PDF      
CHAPTER 3 PDF      
CHAPTER 4 PDF      
CHAPTER 5 PDF      
CHAPTER 6 PDF      
REFERENCES PDF