ETDs @PUC-Rio
| Título: | SYNTHESIS AND CHARACTERIZATION OF SILICON NITRIDE NANOSTRUCTURES FROM THE CHEMICAL REACTION IN VAPOR PHASE | ||||||||||||
| Autor: |
MARIELLA CORTEZ CAILLAHUA |
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| Colaborador(es): |
BRUNNO FERREIRA DOS SANTOS - Orientador FRANCISCO JOSE MOURA - Coorientador |
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| Catalogação: | 18/MAR/2019 | Língua(s): | PORTUGUESE - BRAZIL |
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| Tipo: | TEXT | Subtipo: | THESIS | ||||||||||
| Notas: |
[pt] Todos os dados constantes dos documentos são de inteira responsabilidade de seus autores. Os dados utilizados nas descrições dos documentos estão em conformidade com os sistemas da administração da PUC-Rio. [en] All data contained in the documents are the sole responsibility of the authors. The data used in the descriptions of the documents are in conformity with the systems of the administration of PUC-Rio. |
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| Referência(s): |
[pt] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=37377&idi=1 [en] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=37377&idi=2 |
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| DOI: | https://doi.org/10.17771/PUCRio.acad.37377 | ||||||||||||
| Resumo: | |||||||||||||
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Nanostructured silicon nitride powders (Si3N4) were synthesized at 300 Celsius degrees by precipitation from the vapor phase reaction between silicon chloride (SiCl4) and ammonia (NH3). Argon (Ar) was used as carrier gas. Solid ammonium chloride (NH4Cl) is formed as by-product, in addition to silicon nitride powder. When exposed to the atmosphere these powders are readily oxidized to silicon oxynitride. Crystalline phases of Si3N4 were obtained by heat treatment in an argon atmosphere at 1500 Celsius degrees for 2 hours. Characterization by X-ray Diffraction and Infrared Spectroscopy with Fourier Transform (FTIR) revealed formation of the alpha-Si3N4 and beta-Si3N4 phases, silicon dioxide and silicon oxynitrides. Field emission scanning electron microscopy (SEM-FEG) and Transmission Electron Microscopy (MET) showed different morphologies such as nano sticks, faceted crystals, ribbons and whiskers. The selected area diffraction pattern (SADP) indicates the crystalline nature of the columnar particles and the HRTEM images reveal that the lattice fringe spacing is 0.67 nm, which match with the (100) plane of alpha-Si3N4. The highest specific surface area of the powders determined, by BET, was 96.56 m(2)/g.
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