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ETDs @PUC-Rio
Estatística
Título: HUMIDITY SENSOR BASED ON MEMS SAW TECHNOLOGY
Autor: SERGIO GUTIERREZ ESCOBAR
Colaborador(es): ARTHUR MARTINS BARBOSA BRAGA - Orientador
SULLY MILENA MEJIA QUINTERO - Coorientador
Catalogação: 25/ABR/2017 Língua(s): ENGLISH - UNITED STATES
Tipo: TEXT Subtipo: THESIS
Notas: [pt] Todos os dados constantes dos documentos são de inteira responsabilidade de seus autores. Os dados utilizados nas descrições dos documentos estão em conformidade com os sistemas da administração da PUC-Rio.
[en] All data contained in the documents are the sole responsibility of the authors. The data used in the descriptions of the documents are in conformity with the systems of the administration of PUC-Rio.
Referência(s): [pt] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=29753&idi=1
[en] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=29753&idi=2
DOI: https://doi.org/10.17771/PUCRio.acad.29753
Resumo:
Micro electromechanical systems (MEMS) are devices that combine mechanical structures with electrical circuits at the micro scale, to function as sensors or actuators. One type of MEMS are the surface acoustic waves (SAW) devices, which uses the surface wave velocity or propagation path variations to measure the variable of interest. One important application in chemical processes is related to environment condition control, specifically humidity measurement. With that purpose, a commercial SAW was purchased and coated with a polymer layer in its surface. The PolyVynil Alcohol (PVA) was chosen to be the sensing layer in the SAW due to water vapor absorption properties, that increases the mass over the surface and decrease the wave velocity, leading to sense this humidity changes. 5.6wt per cent PVA solution was prepared and deposited through spin coating. Therefore, a series of tests were carried out in a climatic chamber, varying the humidity and temperature conditions, with the aim to analyze the sensor behavior by measuring its frequency shift. These results were compared with an analytical model and a finite element simulation. The analytical model presented by Sielman determines how the polymer density changes with humidity. These density values were inserted into the Wohltjen equation, which gives the frequency shift of the SAW due to gas absorption. Regarding the finite element simulation, it was carried out in the Comsol Multiphysics software, by solving the different resonating frequencies as a function of the increase in the polymer density due to the insets of humidity values.
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