Título: | CHARACTERIZATION OF MECHANICAL DEFECTS PRODUCED BY NANOINDENTATION IN INP | |||||||
Autor: |
CLARA MUNIZ DA SILVA DE ALMEIDA |
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Colaborador(es): |
RODRIGO PRIOLI MENEZES - Orientador |
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Catalogação: | 11/MAI/2009 | Língua(s): | PORTUGUESE - BRAZIL |
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Tipo: | TEXT | Subtipo: | THESIS | |||||
Notas: |
[pt] Todos os dados constantes dos documentos são de inteira responsabilidade de seus autores. Os dados utilizados nas descrições dos documentos estão em conformidade com os sistemas da administração da PUC-Rio. [en] All data contained in the documents are the sole responsibility of the authors. The data used in the descriptions of the documents are in conformity with the systems of the administration of PUC-Rio. |
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Referência(s): |
[pt] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=13442&idi=1 [en] https://www.maxwell.vrac.puc-rio.br/projetosEspeciais/ETDs/consultas/conteudo.php?strSecao=resultado&nrSeq=13442&idi=2 |
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DOI: | https://doi.org/10.17771/PUCRio.acad.13442 | |||||||
Resumo: | ||||||||
In this thesis, the mechanical deformation mechanism of semiconductors
III-V was studied, especially for InP. Defects were produced by indentations using
an atomic force microscope and a Triboscope nanoindenter. The AFM tip torsion
during indentation difficult the control and the reproducibility of AFM
nanoindentation experiments. Nevertheless, the tip torsion allowed the
measurement of the materials Yield stress. A study of the mechanical deformation
mechanism of the native oxide that is presented in the surface of InP (100) and
GaAs (100) was done. The residual plastic impressions attributed to native oxides
were observed on the semiconductors surface. The plastic deformation process of
the InP was studied in nanoindentation experiments using a Berkovich and a
conosferical tip. The InP deformation mechanism observed with a Berkovich tip
presents discontinuities for indentations performed at high loads, that are
associated with successive slip of {111} planes along the <110> directions. The
pressure distribution on the indented region, applied by the conosferical tip, is
isotropic allowing a better visualization of the elastic/plastic transition in a material
deformation process. The plastic deformation of InP using this tip is initialized
with a catastrophic event, that appears in the indentation curves as a discontinuity.
Small cracks were observed around the indentations using both tips, suggesting
that some dislocations loops ends on the InP surface. Bigger cracks were observed
in indentations with the conosferical tip and they were attributed to material
fracture produced by the locking of dislocations near the surface. Transmission
electron microscopy was done in the nanoindentation cross section showing a high
density of defects created by the slip of the {111} planes.
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